The Interconnection of Semiconductors and Probe Stations

Probe stations stand as crucial testing tools within the semiconductor industry, extensively utilized for precise electrical measurements on intricate, high-speed devices. Their primary objective is to ensure product quality and reliability while concurrently reducing research and development time and costs in the manufacturing process.high voltage probe Semiconductor testing can be categorized into three main types: verification test, wafer test, and package test. The probe platform specifically plays a pivotal role in wafer testing, chip development, and the failure analysis of the wafer manufacturing process.

The integral components of a probe stage encompass:

1. Sample Stage:

A sample stage functions as a device to position a wafer or chip.wafer chuck Tailored to the dimensions of the wafer, it is equipped with precision movement positioning capabilities. Kronos has developed an ultra-precise air-bearing motion stage for optimal wafer or chip positioning within an extremely brief exposure time, facilitating meticulous inspection.

2. Optics:

Serving the purpose of visual magnification,manual prober optics allow the observation of the object to be measured. This ensures accurate alignment and placement of the probe tip on the measuring point of the targeted wafer.

3. Collet:

The collet, featuring a flat metal surface, is affixed to the object to be measured using a fixture or vacuum adsorption piece.

Operational Mechanism of a Probe Table:

Probe tables serve to secure wafers or chips in place and precisely position the object for measurement. Users of manual probe tables mount the probe arm and probes in the manipulator, placing the probe tips correctly on the object through the microscope. Testing commences when all probe tips are appropriately positioned.

User information allows the separation of probes from a wafer with multiple chips by elevating the platen. The table is then moved to the next chip, aligning it accurately using an electron microscope. After lowering the platen, testing of the subsequent chip can proceed. Semi-automated and fully automated probe systems focus on enhancing efficiency through agro-mechanized tables and machine learning vision techniques.

Role of the Probe Station:

A probe station positions electronic, optical, or radio frequency detectors on a silicon wafer for testing semiconductor devices, working in conjunction with a test instrument or semiconductor test system. Wafer inspection is a crucial step in semiconductor manufacturing, and the choice of the right wafer probe platform and probes significantly impacts the inspection process. Kronos' self-developed ultra-precision air-bearing motion platforms, known for their high accuracy and motion stability, enhance inspection efficiency by accurately identifying and measuring various wafer defects during rapid operation.